Optical proximity correction for 0.13 m SiGe:C BiCMOS.
| Autor: | Geisler, S., Bauer, J., Haak, U., Jagdhold, U., Pliquett, R., Matthus, E., Schrader, R., Wolf, H., Baetz, U., Beyer, H., Niehoff, M. |
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| Zdroj: | Proceedings of SPIE; Nov2008, Issue 1, p679210-679210-6, 6p |
| Databáze: | Complementary Index |
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