Process flow innovations for photonic device integration in CMOS.
| Autor: | Beals, Mark, Michel, J., Liu, J. F., Ahn, D. H., Sparacin, D., Sun, R., Hong, C. Y., Kimerling, L. C., Pomerene, A., Carothers, D., Beattie, J., Kopa, A., Apsel, A., Rasras, M. S., Gill, D. M., Patel, S. S., Tu, K. Y., Chen, Y. K., White, A. E. |
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| Zdroj: | Proceedings of SPIE; Nov2008, Issue 1, p689804-689804-14, 14p |
| Databáze: | Complementary Index |
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