Characterization of CD-SEM metrology for iArF photoresist materials.
| Autor: | Bunday, Benjamin, Cordes, Aaron, Orji, N. G., Piscani, Emil, Cochran, Dan, Byers, Jeff, Allgair, John, Rice, Bryan J., Avitan, Yohanan, Peltinov, Ram, Bar-zvi, Maayan, Adan, Ofer |
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| Zdroj: | Proceedings of SPIE; Nov2008 Part 2, Issue 1, p69221A-69221A-17, 17p |
| Databáze: | Complementary Index |
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