Ionic photoacid generators containing functionalized semifluorinated sulfonates for high-resolution lithography.
| Autor: | Yi, Yi, Ayothi, Ramakrishnan, Ober, Christopher K., Yueh, Wang, Cao, Heidi |
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| Zdroj: | Proceedings of SPIE; Nov2008 Part 2, Issue 1, p69231B-69231B-8, 8p |
| Databáze: | Complementary Index |
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