Advanced ultraviolet cross-link process and materials for global planarization.
| Autor: | Takei, Satoshi, Horiguchi, Yusuke, Ohashi, Tomoya, Ho, Bang-Ching, Nakajima, Yasuyuki, Mano, Yuichi, Muramatsu, Makoto, Iwashita, Mitsuaki, Tsuchiya, Katsuhiro, Samura, Akira, Yamada, Yoshiaki, Yamaguchi, Tadayuki |
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| Zdroj: | Proceedings of SPIE; Nov2008 Part 2, Issue 1, p69232K-69232K-12, 12p |
| Databáze: | Complementary Index |
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