Accuracy considerations for critical dimension semiconductor metrology.
| Autor: | Orji, N. G., Dixson, R. G., Bunday, B. D., Allgair, J. A. |
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| Zdroj: | Proceedings of SPIE; Nov2008 Part 2, Issue 1, p70420A-70420A-11, 11p |
| Databáze: | Complementary Index |
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