Printability verification for double-patterning technology.
| Autor: | Luk-Pat, Gerard, Panaite, Petrisor, Lucas, Kevin, Cork, Christopher, Wiaux, Vincent, Verhaegen, Staf, Maenhoudt, Mireille |
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| Zdroj: | Proceedings of SPIE; Nov2008 Part 2, Issue 1, p71220Q-71220Q-11, 11p |
| Databáze: | Complementary Index |
| Externí odkaz: |
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