Application of carbon nanotube probes in a critical dimension atomic force microscope.

Autor: Park, B. C., Choi, J., Ahn, S. J., Kim, D-H, Lyou, J., Dixson, R., Orji, N. G., Fu, J., Vorburger, T. V.
Zdroj: Proceedings of SPIE; Nov2007, Issue 1, p651819-651819-14, 14p
Databáze: Complementary Index