Application of carbon nanotube probes in a critical dimension atomic force microscope.
Autor: | Park, B. C., Choi, J., Ahn, S. J., Kim, D-H, Lyou, J., Dixson, R., Orji, N. G., Fu, J., Vorburger, T. V. |
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Zdroj: | Proceedings of SPIE; Nov2007, Issue 1, p651819-651819-14, 14p |
Databáze: | Complementary Index |
Externí odkaz: |