Vaporization and deposition of an intact polyimide precursor by resonant infrared pulsed laser ablation.

Autor: Dygert, N. L., Schriver, K. E., Haglund Jr., R. F.
Zdroj: Proceedings of SPIE; Nov2006, Issue 1, p61070N-61070N-9, 9p
Databáze: Complementary Index