Etching of polyimide by a Q-switched CO2 laser.
| Autor: | Imai, Hirofumi, Hamada, Naoya, Minamida, Katsuhiro, Kouno, Mitsuru, Ii, Masakazu, Tanaka, Takashi |
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| Zdroj: | Proceedings of SPIE; Nov2000 Part 2, Issue 1, p617-624, 8p |
| Databáze: | Complementary Index |
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