Processing latitude study on x-ray phase-shifting masks.
| Autor: | Yang, Lei, Khan, Mumit, Taylor, James W., Vladimirsky, Yuli, Dandekar, Niru V. |
|---|---|
| Zdroj: | Proceedings of SPIE; Nov2000 Part 2, Issue 1, p530-538, 9p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|