Structural characteristics and performances of rf-sputtered Mo/Si and Co/Si multilayers for soft x-ray optics.
| Autor: | Boher, Pierre, Houdy, Philippe, Hennet, Louis, Kuehne, Mikhael, Mueller, Peter, Frontier, J. P., Trouslard, P., Senillou, C., Joud, J. C., Ruterana, P. |
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| Zdroj: | Proceedings of SPIE; Nov1992, Issue 1, p21-38, 18p |
| Databáze: | Complementary Index |
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