Automated visual quality evaluation of CVD film.
| Autor: | Kegelmeyer Jr., W. Philip, Hansen, Wilfred J. |
|---|---|
| Zdroj: | Proceedings of SPIE; Nov1992, Issue 1, p88-98, 11p |
| Databáze: | Complementary Index |
| Externí odkaz: |
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| Autor: | Kegelmeyer Jr., W. Philip, Hansen, Wilfred J. |
|---|---|
| Zdroj: | Proceedings of SPIE; Nov1992, Issue 1, p88-98, 11p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|