High-power laser-produced-plasma EUV source.
| Autor: | Ballard, William P., Bernardez II, Luis J., Lafon, Robert E., Anderson, Richard J. M., Perras, Yon E., Leung, Alvin H., Shields, Harry, Petach, Michael B., St. Pierre, Randall J., Bristol, Robert L. |
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| Zdroj: | Proceedings of SPIE; Nov2002, Issue 1, p302-309, 8p |
| Databáze: | Complementary Index |
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