157-nm pellicles: polymer design for transparency and lifetime.
| Autor: | French, Roger H., Wheland, Robert C., Qiu, Weiming, Lemon, M. F., Blackman, Gregory S., Zhang, Xun, Gordon, Joe, Liberman, Vladimir, Grenville, A., Kunz, Roderick R., Rothschild, Mordechai |
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| Zdroj: | Proceedings of SPIE; Nov2002, Issue 1, p576-583, 8p |
| Databáze: | Complementary Index |
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