Plasma diagnostics of Ge-clusters in Si1-xGex mixed crystals.
| Autor: | Gordeev, Yu. S., Mikoushkin, Valery M., Brysgalov, V. V., Zabrodskii, Andrej G., Alekseenko, M. V., Grimmeiss, H. |
|---|---|
| Zdroj: | Proceedings of SPIE; Nov2002, Issue 1, p150-153, 4p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|