Novel highly scalable and very high torque micromotor for MEMS and MOEMS applications using the mechanical rectification of oscillatory motion.
| Autor: | Tabib-Azar, Massood, Sutapun, Boonsong, Motamedi, M. Edward |
|---|---|
| Zdroj: | Proceedings of SPIE; Nov1998 Part 2, Issue 1, p271-279, 9p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|