Recent advances in the Sandia EUV 10x microstepper.
| Autor: | Goldsmith, John E. M., Barr, Pamela K., Berger, Kurt W., Bernardez II, Luis J., Cardinale, Gregory F., Darnold, Joel R., Folk, Daniel R., Haney, Steven J., Henderson, Craig C., Jefferson, Karen J., Krenz, Kevin D., Kubiak, Glenn D., Nissen, Rodney P., O'Connell, Donna J., Perras, Yon E., Ray-Chaudhuri, Avijit K., Smith, Tony G., Stulen, Richard H., Tichenor, Daniel A., Ver Berkmoes, Alfred A. |
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| Zdroj: | Proceedings of SPIE; Nov1998, Issue 1, p11-19, 9p |
| Databáze: | Complementary Index |
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