Surface micromachined devices for microwave and photonic applications.
| Autor: | Chang, M. F., Wu, Ming C., Yao, JeyHsin, Motamedi, M. Edward |
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| Zdroj: | Proceedings of SPIE; Nov1998 Part 2, Issue 1, p214-226, 13p |
| Databáze: | Complementary Index |
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