FTIR reflectance characterization of SIMOX buried oxide layers.
| Autor: | Yakovlev, Victor A., Bosch-Charpenay, Sylvie, Rosenthal, Peter A., Solomon, Peter R., Xu, Jiazhan |
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| Zdroj: | Proceedings of SPIE; Nov1998, Issue 1, p2-9, 8p |
| Databáze: | Complementary Index |
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