Damascene Cu-interconnect formation in benzocyclobuten (BCB) film using a novel end-point monitoring technique.
| Autor: | Hayashi, Yoshihiro, Onodera, Takahiro, Saitoh, Shinobu, Kawahara, Jyun |
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| Zdroj: | Proceedings of SPIE; Nov1998, Issue 1, p30-41, 12p |
| Databáze: | Complementary Index |
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