SPICE Level 3 and BSIM3v3.1 characterization of monolithic integrated CMOS-MEMS devices.
| Autor: | Staple, Bevan D., Watts, Herman A., Dyck, Christopher W., Griego, A. P., Hewlett, F. W., Smith, James H. |
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| Zdroj: | Proceedings of SPIE; Nov1998 Part 2, Issue 1, p410-420, 11p |
| Databáze: | Complementary Index |
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