Fabrication of an electrochemical tip-probe system embedded in SiNx cantilevers for simultaneous SECM and AFM analysis.

Autor: Fasching, Rainer J., Tao, Yao, Prinz, Fritz B.
Zdroj: Proceedings of SPIE; Nov2004, Issue 1, p53-64, 12p
Databáze: Complementary Index