Fabrication of an electrochemical tip-probe system embedded in SiNx cantilevers for simultaneous SECM and AFM analysis.
Autor: | Fasching, Rainer J., Tao, Yao, Prinz, Fritz B. |
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Zdroj: | Proceedings of SPIE; Nov2004, Issue 1, p53-64, 12p |
Databáze: | Complementary Index |
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