Fabrication and characterization of ohmic contacting RF MEMS switches.
| Autor: | Dyck, Christopher W., Plut, Thomas A., Nordquist, Christopher D., Finnegan, Patrick S., Austin, Franklin, Reines, Isak C., Goldsmith, Chuck |
|---|---|
| Zdroj: | Proceedings of SPIE; Nov2004, Issue 1, p79-88, 10p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|