Application of spatial light modulators for microlithography.
| Autor: | Dauderstaedt, Ulrike A., Duerr, Peter, Karlin, Tord, Schenk, Harald, Lakner, Hubert |
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| Zdroj: | Proceedings of SPIE; Nov2004, Issue 1, p119-126, 8p |
| Databáze: | Complementary Index |
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