Toward multifunctional optical integration: an adaptive lithographic method for patterning optical structures.
| Autor: | Dasgupta, Samhita, Shih, Min-Yi, Gorczyca, Thomas, Balch, Ernest, Claydon, Glenn, Douglas, Leonard, Tolliver, Todd, Nielsen, Matthew |
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| Zdroj: | Proceedings of SPIE; Nov2004, Issue 1, p105-114, 10p |
| Databáze: | Complementary Index |
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