Development of magnetohydrodynamic computer modeling of gas-discharge EUV sources for microlithography.
| Autor: | Bauer, Bruno S., Mancini, Roberto C., Makhin, Volodymyr, Paraschiv, Ioana, Esaulov, Andrey, Presura, Radu, Lindemuth, Irvin R., Sheehey, Peter T., Rice, Bryan J. |
|---|---|
| Zdroj: | Proceedings of SPIE; Nov2004, Issue 1, p394-404, 11p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|