Why do weak acids not work in 193-nm photoresists?: matrix effects on acid-catalyzed deprotection.
| Autor: | Pohlers, Gerd, Barclay, George G., Razvi, Azher, Stafford, Carolyne, Barbieri, Anthony, Cameron, James F. |
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| Zdroj: | Proceedings of SPIE; Nov2004, Issue 1, p79-93, 15p |
| Databáze: | Complementary Index |
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