Evaluation of microbeam deflection using interferometry.
| Autor: | Wang, S. H., Tay, Cho J., Quan, Chenggen, Shang, Huai M. |
|---|---|
| Zdroj: | Proceedings of SPIE; Nov2001, Issue 1, p262-267, 6p |
| Databáze: | Complementary Index |
| Externí odkaz: |
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| Autor: | Wang, S. H., Tay, Cho J., Quan, Chenggen, Shang, Huai M. |
|---|---|
| Zdroj: | Proceedings of SPIE; Nov2001, Issue 1, p262-267, 6p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|