Failure analysis of radio frequency (rf) micro-electro-mechanical systems (MEMS).
| Autor: | Walraven, Jeremy A., Cole Jr., Edward I., Sloan, Lynn R., Hietala, Susan L., Tigges, Chris P., Dyck, Christopher W. |
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| Zdroj: | Proceedings of SPIE; Nov2001, Issue 1, p254-259, 6p |
| Databáze: | Complementary Index |
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