Control of debris production of laser plasma sources with high-average XUV power.
Autor: | Bijkerk, Fred, Louis, Eric, Shmaenok, Leonid A., Voorma, Harm-Jan, van der Wiel, Marnix J., Turcu, I. C. Edmond, Tallents, Gregory J. |
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Zdroj: | Proceedings of SPIE; Nov1993, Issue 1, p516-520, 5p |
Databáze: | Complementary Index |
Externí odkaz: |