Oxygen effect on characteristics of a PGMA resist.
| Autor: | Taniguchi, Yoshio, Kaneko, Tadao, Nakano, Toshio, Hashimoto, Michiaki, Sasano, Akira, Tsutsui, Ken, Naraoka, Kiyotake |
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| Zdroj: | Journal of Applied Polymer Science; Mar1982, Vol. 27 Issue 3, p1087-1090, 4p |
| Databáze: | Complementary Index |
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