Formation of V-shaped pits in InGaN/GaN multiquantum wells and bulk InGaN films.

Autor: Kim, Ig-Hyeon, Park, Hyeong-Soo, Park, Yong-Jo, Kim, Taeil
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Zdroj: Applied Physics Letters; 9/21/1998, Vol. 73 Issue 12, 1 Chart, 5 Graphs
Abstrakt: InGaN/GaN multiquantum well structures and bulk InGaN films grown on (0001) sapphire substrate were investigated by cross-sectional transmission electron microscopy and double crystal x-ray diffraction. Highly strained InGaN layers with a high In mole fraction were found to contain V-shaped surface pits with (10–11) facet planes on pure or mixed screw treading dislocations. Phase separation was also found on thick InGaN/GaN superlattices and bulk InGaN layers. The mechanism of the surface pit formation was discussed in terms of strain energy and surface mobility of InGaN. © 1998 American Institute of Physics. [ABSTRACT FROM AUTHOR]
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