Selective-Area Atomic Layer Deposition Using Poly(vinyl pyrrolidone) as a Passivation Layer.
| Autor: | Färm, Elina, Kemell, Marianna, Santala, Eero, Ritala, Mikko, Leskelä, Markku |
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| Zdroj: | Journal of The Electrochemical Society; 2010, Vol. 157 Issue 1, pK10-K14, 5p |
| Databáze: | Complementary Index |
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