Auger electron spectroscopy and microscopy with probe-size limited resolution.

Autor: Hembree, G.G., Drucker, J.S., Luo, F.C.H., Krishnamurthy, M., Venables, J.A.
Předmět:
Zdroj: Applied Physics Letters; 4/29/1991, Vol. 58 Issue 17, p1890, 3p, 3 Black and White Photographs, 2 Diagrams, 2 Graphs
Abstrakt: Reports that high spatial resolution Auger electron spectra and images have been obtained by optimizing secondary electron collection efficiency in a scanning transmission electron microscope. Description of an ultrahigh vacuum capable of collecting Auger electron spectra and images.
Databáze: Complementary Index