| Autor: |
Brake, M.L., Pender, J., Fournier, J. |
| Předmět: |
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| Zdroj: |
Physics of Plasmas; May99, Vol. 6 Issue 5, p2307, 7p, 3 Diagrams, 1 Chart, 8 Graphs |
| Abstrakt: |
Presents a collaborative experimental effort initiated at a workshop at the 1988 Gaseous Electronics Conference to start a program to understand the fundamental physics of processing plasmas. Effort to give researchers a baseline experiment to develop plasma diagnostics to be used on manufacturing plasma systems; Use of aluminum electrodes in a parallel plat configuration. |
| Databáze: |
Complementary Index |
| Externí odkaz: |
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