Origin of the time dependence of wet oxidation of AlGaAs.

Autor: Ashby, Carol I.H., Bridges, Monica M.
Předmět:
Zdroj: Applied Physics Letters; 7/5/1999, Vol. 75 Issue 1, p73, 3p, 1 Diagram, 2 Graphs
Abstrakt: Discusses the origin of the time dependence of wet oxidation of high-aluminum-content aluminum gallium arsenide, which can either be linear or parabolic. Indicators of reaction-time limitation and diffusion-limited rates; Favoring of the shift from linear to parabolic time dependence by increasing temperature or increasing aluminum mole fraction.
Databáze: Complementary Index