| Autor: |
Edelstein, A. S., Burnette, J. E., Fischer, G. A., Olver, K., Egelhoff, Wm., Nowak, E., Cheng, Shu-Fan |
| Předmět: |
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| Zdroj: |
Journal of Applied Physics; Apr2009, Vol. 105 Issue 7, p07E720-07E723, 3p, 1 Color Photograph, 4 Graphs |
| Abstrakt: |
With the microelectromechanical system (MEMS) flux concentrator, we have been able to increase the operating frequency of small magnetic sensors above the region where 1/f noise dominates. The device accomplished this by modulating the field via the oscillatory motion of flux concentrators on MEMS flaps. Electrostatic comb drives were used to drive the MEMS flaps. We have demonstrated an increase in the signal to noise ratio at 1 Hz, that the power signal correctly depends on V4 where V is the amplitude of the voltage energizing the comb drives, and that the signal increases dramatically with vacuum packaging. [ABSTRACT FROM AUTHOR] |
| Databáze: |
Complementary Index |
| Externí odkaz: |
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