| Autor: |
Franke, Eva, Trimble, C. L., DeVries, M. J., Woollam, J. A., Schubert, M., Frost, F. |
| Předmět: |
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| Zdroj: |
Journal of Applied Physics; 11/1/2000, Vol. 88 Issue 9, p5166, 9p, 1 Black and White Photograph, 4 Charts, 7 Graphs |
| Abstrakt: |
Examines the dielectric function of amorphous tantalum oxide from the far infrared to the deep ultraviolet spectral region measured by spectroscopic ellipsometry. Analysis of amorphous tantalum oxide thin films by glancing angle-of-incidence x-ray diffraction, atomic force microscopy and variable spectroscopic ellipsometry. |
| Databáze: |
Complementary Index |
| Externí odkaz: |
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