Microstructure of sputter-deposited Co/Si multilayer thin films.

Autor: Fallon[a], J. M., Faunce, C. A., Grundy[b], P. J.
Předmět:
Zdroj: Journal of Applied Physics; 9/1/2000, Vol. 88 Issue 5, p2400, 8p, 5 Black and White Photographs, 8 Graphs
Abstrakt: Presents the results of an investigation by transmission electron microscopy, electron diffraction, x-ray diffraction and x-ray reflectivity of sputter-deposited Co/Si multilayers. Retention of elemental regions in structures with individual layer thicknesses; Occurrence of significant intermixing with alloy formation through differentiation in multilayers below five nanometers.
Databáze: Complementary Index