Vibration mode frequency formulae for micromechanical scanners.
Autor: | Hakan Urey, Cihan Kan and Wyatt O Davis |
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Zdroj: | Journal of Micromechanics & Microengineering; Sep2005, Vol. 15 Issue 9, p1713-1721, 9p |
Databáze: | Complementary Index |
Externí odkaz: |