Autor: |
Zorina, M. V., Mikhailenko, M. S., Pestov, A. E., Toropov, M. N., Chernyshev, A. K., Chkhalo, N. I., Gordeev, S. K., Vitkin, V. V. |
Předmět: |
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Zdroj: |
Technical Physics; 2024, Vol. 69 Issue 3, p780-784, 5p |
Abstrakt: |
The paper proposes the use of diamond–carbide–silicon composite „Skeleton"® coated with amorphous silicon as substrates for multilayer X-ray mirrors for powerful synchrotron radiation sources (3+ and 4th generation). The surfaces with the following parameters were obtained using standard deep polishing methods: flatness at the level of RMS90% = 54.2 nm; effective roughness σeff ~ 1.0 nm; high-frequency roughness σ2 × 2 ~ 0.1 nm. [ABSTRACT FROM AUTHOR] |
Databáze: |
Complementary Index |
Externí odkaz: |
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