Improvement of Quality Performance in Mask Production by Feature Selection and Machine Learning Methods and An Application.

Autor:	TEBRİZCİK, Semra, ERSÖZ, Süleyman, AKTEPE, Adnan
Předmět:	FEATURE selection MACHINE learning MANUFACTURING defects EXTREME ultraviolet lithography MEDICAL masks MANUFACTURING processes MASKS
Zdroj:	Journal of Defense Sciences / Savunma Bilmleri Dergisi; may2024, Vol. 20 Issue 1, p167-190, 24p
Databáze:	Complementary Index
Externí odkaz:	Zobrazit plný text záznamu