| Autor: |
Kashizaki, Tsubasa, Tomita, Motohiro, Katayama, Kazuaki, Hoshina, Takumi, Matsuki, Takeo, Chung, Sylvia Yuk Yee, Watanabe, Takanobu |
| Zdroj: |
Japanese Journal of Applied Physics; May2022, Vol. 61 Issue SC, p1-6, 6p |
| Abstrakt: |
Heat guide (HG) is a layer providing a heat flux to the desired part in a micro thermoelectric generator (μ -TEG). In this work, we experimentally investigated the impact of the HG structure on the thermoelectric voltage of a cavity-free planer-type Si-nanowire (Si-NW) μ -TEG, which is embedded in SiO2 acting as an inter-layer dielectric (ILD). Although the heat flows also through the ILD, a sub- μ m-thick HG is able to selectively guide the heat flux to the hot side terminal of the μ -TEG, and the μ -TEG performance is improved by increasing the thickness of the HG. [ABSTRACT FROM AUTHOR] |
| Databáze: |
Complementary Index |
| Externí odkaz: |
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