Dopant Diffusion Simulation in Thin-SOI.
Autor: | Li, Hong-Jyh, Tichy, Robin, Ross, Jonathon, Gelpey, Jeff, Stotts, Ben, Galloway, Heather |
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Zdroj: | MRS Online Proceedings Library; 2003, Vol. 765 Issue 1, p1-6, 6p |
Databáze: | Complementary Index |
Externí odkaz: |