Dopant Diffusion Simulation in Thin-SOI.

Autor: Li, Hong-Jyh, Tichy, Robin, Ross, Jonathon, Gelpey, Jeff, Stotts, Ben, Galloway, Heather
Zdroj: MRS Online Proceedings Library; 2003, Vol. 765 Issue 1, p1-6, 6p
Databáze: Complementary Index