Ion implantation of Carbon and Silicon into Ge2Sb2Te5: Ion Profiles and Post Crystallization Redistribution.
Autor: | Cohen, Guy M., Raoux, Simone, Hopstaken, Marinus, Maurer, Siegfried |
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Zdroj: | MRS Online Proceedings Library; 2011, Vol. 1338 Issue 1, p1-5, 5p |
Databáze: | Complementary Index |
Externí odkaz: |