Diffusional Hillock Formation in Al Thin Films Controlled by Creep.

Autor: Kim, Deok-kee, Nix, William D., Arzt, Eduard, Deal, Michael D., Plummer, James D.
Zdroj: MRS Online Proceedings Library; Dec1999, Vol. 561 Issue 1, p129-134, 6p
Databáze: Complementary Index