Holistic feedforward control for the 5 nm node and beyond.
Autor: | Megens, Henry, Brinkhof, Ralph, Aarts, Igor, Kok, Haico, Karssemeijer, Leendertjan, Haaf, Gijs ten, Lee, Shawn, Slotboom, Daan, de Ruiter, Chris, Lyulina, Irina, Huisman, Simon, Keij, Stefan, Mos, Evert, Tel, Wim, Rijpstra, Manouk, Schmitt-Weaver, Emil, Bhattacharyya, Kaustuve, Socha, Robert, Menchtchikov, Boris, Kubis, Michael |
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Zdroj: | Proceedings of SPIE; 1/24/2019, Vol. 10961, p109610K-1-109610K-13, 13p |
Databáze: | Complementary Index |
Externí odkaz: |