Novel technologies in coater/developer to enhance the CD stability and to improve the defectivity toward N7 and smaller nodes.
| Autor: | Yuya Kamei, Yohei Sano, Takashi Yamauchi, Shinichiro Kawakami, Masahide Tadokoro, Masashi Enomoto, Makoto Muramatsu, Kathleen Nafus, Akihiro Sonoda, Demand, Marc, Foubert, Philippe |
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| Zdroj: | Proceedings of SPIE; 1/20/2019, Vol. 10957, p109571P-1-109571P-7, 7p |
| Databáze: | Complementary Index |
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