Effect of the sublayer material on the formation of electrical contact and the growth rate of carbon nanotubes in a low-temperature plasma using the example of Ni/Ti/Si and Fe/W/Si structures.
| Autor: | Klimin, Viktor S., Rezvan, Alexey A., Ageev, Oleg A. |
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| Zdroj: | Proceedings of SPIE; 3/26/2019, Vol. 11022, p1-7, 7p |
| Databáze: | Complementary Index |
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